@inproceedings{M083.007*, author={Maes, H.E. and Heyns, G. and Remmeric, J. and Hinoul, M. and Loos, H. and Van Calster, A. and Lequesne, A. and Allaert, K.}, title={Comparative Study of plasma nitrides for IC passivation}, booktitle={Proceedings 1983, Meeting Electrochemical Society}, year={1983}, pages={177}, publisher={Meeting Electrochemical Society}, }