@inproceedings{M083.007*,
author={Maes, H.E. and Heyns, G. and Remmeric, J. and Hinoul, M. and Loos, H. and Van Calster, A. and Lequesne, A. and Allaert, K.},
title={Comparative Study of plasma nitrides for IC passivation},
booktitle={Proceedings 1983, Meeting Electrochemical Society},
year={1983},
pages={177},
publisher={Meeting Electrochemical Society},
}