@inproceedings{M086.019,
author={Allaert, K. and Van Calster, A. and Vervaet, A.},
title={Evaluation of PCVD Silicon Nitride as a Total Passivation Layer for Chips},
booktitle={5th VLSI Packaging Workshop},
year={1986},
month={11},
pages={26},
address={Parijs},
}