@inproceedings{M092.059*,
author={De Baets, J. and Van Calster, A. and Capon, J. and De Rycke, I. and De Smet, H. and Doutreloigne, J. and Vanfleteren, J.},
title={Silicon Oxynitride Layers for Device Passivation},
booktitle={Symp. of The Electrochemical Society, in Thin Film Transistor Technologies},
year={1992},
volume={92-2},
pages={454-455},
address={Toronto},
}