@inproceedings{M092.059*, author={De Baets, J. and Van Calster, A. and Capon, J. and De Rycke, I. and De Smet, H. and Doutreloigne, J. and Vanfleteren, J.}, title={Silicon Oxynitride Layers for Device Passivation}, booktitle={Symp. of The Electrochemical Society, in Thin Film Transistor Technologies}, year={1992}, volume={92-2}, pages={454-455}, address={Toronto}, }