@article{P085.003, author={Allaert, K. and Van Calster, A. and Loos, H. and Lequesne, A.}, title={A Comparision Between Silicon Nitride Films Made by PCVD of N2-SiH4/Ar and N2-SiH4/He}, journal={Journal of the Electrochemical Society}, year={1984}, month={7}, volume={132}, number={7}, pages={1763-1766}, }