@article{P085.003,
author={Allaert, K. and Van Calster, A. and Loos, H. and Lequesne, A.},
title={A Comparision Between Silicon Nitride Films Made by PCVD of N2-SiH4/Ar and N2-SiH4/He},
journal={Journal of the Electrochemical Society},
year={1984},
month={7},
volume={132},
number={7},
pages={1763-1766},
}