@inproceedings{P085.022, author={Allaert, K. and Van Calster, A.}, title={Evaluation of P.C.V.D. Silicon Nitride as a Thin Film Isolator, as a Cross Over Dielectric Film and as a Passivation Layer}, booktitle={Proceedings 3th Int. Conference on Plasma Etching and Plasma Deposition}, year={1985}, month={11}, pages={239-243}, }