@inproceedings{P085.022,
author={Allaert, K. and Van Calster, A.},
title={Evaluation of P.C.V.D. Silicon Nitride as a Thin Film Isolator, as a Cross Over Dielectric Film and as a Passivation Layer},
booktitle={Proceedings 3th Int. Conference on Plasma Etching and Plasma Deposition},
year={1985},
month={11},
pages={239-243},
}