@inbook{P085.033,
author={Van Calster, A.},
title={Thin Film Technology},
booktitle={Handbook of Microelectronics Packaging & Interconn. Technol.},
year={1985},
pages={15-38},
editor={Sinnaduria, F.N.},
publisher={AYR: Electrochem Publications},
address={Ayr},
}