@inproceedings{P086.027,
author={Allaert, K. and Van Calster, A. and Vervaet, A.},
title={Evaluation of PCVD silicon nitride as total passivation layer for chips},
booktitle={Proceedings of the 5th VLSI Packaging Workshop},
year={1986},
month={11},
pages={26},
address={Paris},
}