@inproceedings{P095.083, author={Lernout, J. and Van Calster, A. and Vereecken, M. and Schols, G.}, title={Two Layer Silicon Hybrids Interconnect Technology}, booktitle={Proceedings of 1995 International Conference on Multichip Modules}, year={1995}, month={4}, pages={375-380}, address={Denver}, }