@article{P098.005, author={Lernout, J. and Vanfleteren, J. and Van Calster, A. and Schols, G.}, title={A five-layer thin film MCM-Si design using oxynitride dielectrics}, journal={Microelectronics International}, year={1998}, month={1}, volume={15}, number={1}, pages={39-42}, publisher={MCB University Press}, address={Bradford}, }