@article{P098.005,
author={Lernout, J. and Vanfleteren, J. and Van Calster, A. and Schols, G.},
title={A five-layer thin film MCM-Si design using oxynitride dielectrics},
journal={Microelectronics International},
year={1998},
month={1},
volume={15},
number={1},
pages={39-42},
publisher={MCB University Press},
address={Bradford},
}