@inproceedings{P098.098, author={De Pauw, H. and De Smet, H. and Vanfleteren, J. and Lernout, J. and Van Calster, A.}, title={Multilayer motherboard technology in MCM-Si with opto-electronic features}, booktitle={Proceedings of the International Symposium on Microelectronics (IMAPS `98)}, year={1998}, month={11}, pages={347-352}, address={San Diego}, }