@inproceedings{P098.099,
author={Zhang, S. and Vereeken, M. and De Baets, J. and Van Calster, A.},
title={The fabrication and reliability of a photovia test vehicle for MCM-L applications},
booktitle={Proceedings of the International Symposium on Microelectronics (IMAPS `98)},
year={1998},
month={11},
pages={53-58},
address={San Diego},
}