@inproceedings{P098.099, author={Zhang, S. and Vereeken, M. and De Baets, J. and Van Calster, A.}, title={The fabrication and reliability of a photovia test vehicle for MCM-L applications}, booktitle={Proceedings of the International Symposium on Microelectronics (IMAPS `98)}, year={1998}, month={11}, pages={53-58}, address={San Diego}, }