@article{P100.008,
author={De Pauw, H. and De Smet, H. and Vanfleteren, J. and Lernout, J. and Van Calster, A.},
title={Extension of a multilayer interconnection technology in MCM-Si with opto-electronic facilities},
journal={Microelectronics Reliability},
year={2000},
month={1},
volume={40},
pages={163-170},
publisher={Elsevier Science Ltd.},
}