@article{P100.008, author={De Pauw, H. and De Smet, H. and Vanfleteren, J. and Lernout, J. and Van Calster, A.}, title={Extension of a multilayer interconnection technology in MCM-Si with opto-electronic facilities}, journal={Microelectronics Reliability}, year={2000}, month={1}, volume={40}, pages={163-170}, publisher={Elsevier Science Ltd.}, }