@inproceedings{P100.194, author={Colson, P.M.F. and De Pestel, F. and Tack, M. and Schols, G. and De Smet, H. and Van den Steen, J. and Van Calster, A.}, title={The design and fabrication of a GXGA microdisplay chip}, booktitle={Proceedings of the SPIE on Micromachining, Micromanufacturing and Microelectronic Manufacturing 2000}, year={2000}, month={9}, volume={4181}, pages={315-323}, editor={Burnett, D. and Kimura, S. and Singh, B.}, publisher={SPIE}, series={Challenges in Process Integration}, address={Santa Clara, California, USA}, }