@inproceedings{P102.114, author={Stuyven, G. and De Visschere, P. and Neyts, K. and Hikavyy, A.}, title={Thermal annealing of ZnS:Mn TFEL devices fabricated with an organometallic precursor-based ALD process}, booktitle={Proceedings of the 11th International Workshop on Inorganic and Organic Electroluminescence & 2002 International Conference on the Science and Technology of Emissive Displays and Lighting}, year={2002}, month={9}, pages={359-362}, editor={Neyts, K. and De Visschere, P. and Poelman, D.}, publisher={Academia Press & Ghent University}, address={Gent}, }