@article{P103.035,
author={Manirambona, B. and De Baets, J. and Vervaet, A.},
title={Eximer laser microvia-technology in multichip modules},
journal={Applied Surface Science},
year={2003},
month={5},
number={208-209},
pages={171-176},
publisher={Elsevier Science B.V.},
}