@inproceedings{P103.044, author={Manirambona, B. and De Baets, J. and Vervaet, A.}, title={Optimization of microvia-technology using an excimer laser for application in microelectronics}, booktitle={E-MRS 2003 Spring Meeting, Book of Abstracts}, year={2003}, month={6}, pages={APPL H-IX.4}, publisher={EMRS}, address={Straatsburg}, }