@inproceedings{P103.044,
author={Manirambona, B. and De Baets, J. and Vervaet, A.},
title={Optimization of microvia-technology using an excimer laser for application in microelectronics},
booktitle={E-MRS 2003 Spring Meeting, Book of Abstracts},
year={2003},
month={6},
pages={APPL H-IX.4},
publisher={EMRS},
address={Straatsburg},
}