@inproceedings{P103.259, author={Sterken, Tom and Fiorini, P and Baert, K and Puers, R and Borghs, G}, title={An electret-based electrostatic ยต-generator}, booktitle={Boston Transducers '03 : digest of technical papers, vols 1 and 2}, year={2003}, pages={1291-1294}, publisher={IEEE}, address={New York, NY, USA}, }