@inproceedings{P103.266,
author={Sterken, Tom and Baert, K and Puers, R and Borghs, G and Mertens, R},
title={A new power MEMS component with variable capacitance},
booktitle={2003 Proceedings : Pan Pacific Microelectronics symposium},
year={2003},
pages={27-34},
publisher={Surface Mount Technology Association},
address={Edina, MN, USA},
}