@inproceedings{P103.266, author={Sterken, Tom and Baert, K and Puers, R and Borghs, G and Mertens, R}, title={A new power MEMS component with variable capacitance}, booktitle={2003 Proceedings : Pan Pacific Microelectronics symposium}, year={2003}, pages={27-34}, publisher={Surface Mount Technology Association}, address={Edina, MN, USA}, }