@inproceedings{P104.283, author={Sterken, Tom and Fiorini, Paolo and Baert, Kris and Borghs, Gustaaf and Puers, Robert}, title={Novel design and fabrication of a MEMS electrostatic vibration scavenger}, booktitle={Fourth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2004)}, year={2004}, pages={18-21}, address={Kyoto, Japan}, }