@inproceedings{P104.283,
author={Sterken, Tom and Fiorini, Paolo and Baert, Kris and Borghs, Gustaaf and Puers, Robert},
title={Novel design and fabrication of a MEMS electrostatic vibration scavenger},
booktitle={Fourth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2004)},
year={2004},
pages={18-21},
address={Kyoto, Japan},
}