@inproceedings{P109.243, author={Beernaert, Roel and Podprocky, Tomas and Witvrouw, Ann and Haspeslagh, Luc and Avci, Aykut and De Smet, Jelle and De Smet, Herbert}, title={Novel micromirror design with variable pull-in voltage}, booktitle={International Conference on Micro- and Nano-Engineering, 35th, Abstracts}, year={2009}, pages={2}, address={Ghent, Belgium}, }