@inproceedings{P109.243,
author={Beernaert, Roel and Podprocky, Tomas and Witvrouw, Ann and Haspeslagh, Luc and Avci, Aykut and De Smet, Jelle and De Smet, Herbert},
title={Novel micromirror design with variable pull-in voltage},
booktitle={International Conference on Micro- and Nano-Engineering, 35th, Abstracts},
year={2009},
pages={2},
address={Ghent, Belgium},
}