@inproceedings{P110.204,
author={Witvrouw, Ann and Van Hoof, Rita and Bryce, George and Du Bois, Bert and Verbist, Agnes and Severi, Simone and Haspeslagh, Luc and Osman, Haris and De Coster, Jeroen and Wen, Lianggong and Puers, Robert and Beernaert, Roel and De Smet, Herbert and Rudra, Sukumar and Van Thourhout, Dries},
title={SiGe MEMS technology : a platform technology enabling different demonstrators},
booktitle={ECS TRANSACTIONS},
year={2010},
volume={33},
number={6},
pages={799-812},
publisher={Electrochemical Society (ECS)},
address={Pennington, NJ, USA},
}