@inproceedings{P110.233,
author={Woestyn, Pierre and Raman, Johan and Rombouts, Pieter and Weyten, Ludo and De Baets, Patrick},
title={A dual-mass capacitive-readout accelerometer operated near pull-in},
booktitle={Midwest Symposium on Circuits and Systems Conference Proceedings},
year={2010},
pages={1185-1188},
publisher={IEEE},
address={Piscataway, NJ, USA},
}